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Therma-Wave Secures $15 Million Credit Line Renewal From Silicon Valley Bank

FREMONT, Calif.--(BUSINESS WIRE)--June 17, 2005--Therma-Wave, Inc. (Nasdaq:TWAV), a worldwide leader in the development, manufacture and sale of process control metrology systems used in the manufacture of semiconductors, today announced the Company has secured a two year renewal of its $15 million line of credit from Silicon Valley Bank, the primary commercial banking subsidiary of SVB Financial Group. The line of credit is available to finance working capital needs.

"We are very pleased to extend our relationship with Silicon Valley Bank. The availability of this $15 million credit facility provides Therma-Wave with additional access to capital, strengthens our financial position and provides increased flexibility as we focus on growing our metrology business worldwide. Silicon Valley Bank has been a valuable partner to Therma-Wave and this credit facility renewal demonstrates the confidence our bankers have in our business," stated Joe Passarello, vice president of finance for Therma-Wave.

"We are proud of Therma-Wave's successes and are happy to offer a solution that meets the Company's financial service needs," said Quentin Falconer, senior relationship manager, Silicon Valley Bank. "Therma-Wave has been a strong member of our nationwide portfolio of technology companies and we look forward to working with the Company as they continue to grow and expand."

About Silicon Valley Bank

Silicon Valley Bank provides diversified financial services to emerging growth and mature companies in the technology, life science, private equity and premium wine industries. Through its focus on specialized markets and extensive knowledge of the people and business issues driving them, Silicon Valley Bank provides a level of service and partnership that measurably impacts its clients' success. Founded in 1983 and headquartered in Santa Clara, Calif., the company serves clients around the world through 27 domestic offices and two international subsidiaries in the U.K. and India. More information on the company can be found at www.svb.com.

About Therma-Wave, Inc.

Since 1982, Therma-Wave, Inc., has been revolutionizing process control metrology systems through innovative proprietary products and technologies. The company is a worldwide leader in the development, manufacture, marketing and service of process control metrology systems used in the manufacture of semiconductors. Therma-Wave currently offers leading-edge products to the semiconductor manufacturing industry for the measurement of transparent and semi-transparent thin films; for the measurement of critical dimensions and profile of IC features; for the monitoring of ion implantation; and for the integration of metrology into semiconductor processing systems. For further information about Therma-Wave, Inc., access the web site at: www.thermawave.com.

    CONTACT: Therma-Wave, Inc.
             Joe Passarello, 510-668-2200

    SOURCE: Therma-Wave, Inc.
"Safe Harbor" Statement under the Private Securities Litigation Reform Act of 1995: Statements in this press release regarding Therma-Wave, Inc.'s business which are not historical facts are "forward-looking statements" that involve risks and uncertainties. For a discussion of such risks and uncertainties, which could cause actual results to differ from those contained in the forward-looking statements, see "Risk Factors" in the Company's Annual Report or Form 10-K for the most recently ended fiscal year.
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