Axcelis Receives Follow On Order For 'Purion XE' From Foundry In China
Executive Vice President, Customer Operations
The Company recently introduced several high energy product line extensions, including the Purion EXE and VXE, to provide customers with the capability to perform ultra-high energy implants. The applications for these implants continue to expand in the specialty device market. All systems are available in both 200 and 300mm configurations.
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