Axcelis Wins Multiple System, Revenue Order For 'Purion H' From Chipmaker In Asia Pacific For DRAM Manufacturing

November 4, 2014 at 8:01 AM EST
Systems Will Be Used To Support Capacity Expansion

BEVERLY, Mass., Nov. 4, 2014 /PRNewswire/ -- Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of innovative, high-productivity solutions for the semiconductor industry, announced today that it has received a multiple system, revenue order for the Company's Purion H high current implanter from one of the world's leading manufacturers of DRAM devices in Asia Pacific. Next generation planar and 3D devices have created new manufacturing challenges for implant in both traditional electrical implants as well as new material modification implants. The Purion H's innovative scanned spot beam technology is specifically designed to support these challenges by offering a significantly higher level of control and uniformity relative to dose, energy and angle. The Purion H systems will be used to support the customer's capacity expansion for next generation memory devices. The systems are scheduled to ship in Q4.

John Aldeborgh, executive vice president, customer operations, commented, "This significant order, less than four months after the start of the evaluation, is testament to the Purion H's performance advantages over competitive systems and the confidence our customer has in the production capabilities of the Purion platform. We are now realizing the benefits of our platform strategy in shorter time to market for new products." He continued, "High current is the largest segment of the implant market and presents a significant growth opportunity for Axcelis. We're excited to be a part of this capacity expansion and look forward to increasing our high current market share."

The Power of Purion
The Purion platform redefines the ion implanter application space, delivering unmatched purity, precision and productivity to enhance customers' device performance and yield. On this platform, Axcelis has built the industry's first complete implant product solution designed specifically for advanced planar and 3D devices while providing the most flexible and productive manufacturing capability for our customers. The systems' common cross-product platform architecture is designed to drive manufacturing flexibility and lower the total cost of fab operations. All Purion implanters incorporate Axcelis' industry leading Purion Contamination Shield™ Defense System, for unsurpassed implant quality, so even the most sensitive devices can realize optimized device performance. The platform's proprietary Purion Vector™ dose and angle control system, and constant focal length scanning deliver the most precise and repeatable dopant placement available today. The platform's superior beam current performance combined with the Purion™ 500wph end station provides the industry's highest productivity. The Purion platform includes the Purion M™ medium current implanter, the Purion H™ high current implanter, and the Purion XE™ high energy implanter.

About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 35 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Learn more about Axcelis at www.axcelis.com.

CONTACTS:

Maureen Hart (editorial/media) 978.787.4266
Doug Lawson (investor relations) 978.787.9552

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SOURCE Axcelis Technologies, Inc.